The new Vaisala HUMICAP® humidity sensor has been tested both in laboratory conditions as well as in typical humidity sensor applications. The tests show that:
As in other chemical exposure tests, the new sensor showed less drift than the references in MEK at 900ppm chemical concentration level, see below:

Sensor drift in Methyl ethyl ketone
A heating step simulating a chemical purge was done at the end of the test to see if the sensors would recover from the chemical exposure. Both the reference and the new sensor showed signs of recovery.
More information
Read the whole study Chemical interference test results of a novel humidity sensor (pdf).
Read the related Vaisala News Article Coping even with chemical interference (pdf).